VSM23-X

Long Travel, Modular UHV Compatible Stage.

From £2,644.00 excl. VAT and transportation cost$3,510.00 excl. VAT and transportation cost€3,210.00 excl. VAT and transportation cost

Linear translation stage for ultra high vacuum applications. Travel ranges from 100 to 450 mm and can support loads up to 20 kg. 1 µm or 5 µm resolution available. Modular design enables direct compatibility with all VSM23 and VSM17 stages.

Compatible with AML's vacuum stage mounting brackets. These can be used to create multi-axis mechanisms with VSM stages.

Overview

  • Standard travels from 100 to 450 mm
  • 5 µm resolution (1 µm for option HR)
  • Maximum speed 25 mm/s (5 mm/s for option HR)
  • Suitable for use to 1 x 10-10 mBar
  • Directly stackable for XYZ orientations with all VSM23 and VSM17 stages
  • Lightweight design using UHV-prepared aluminium construction as standard
  • Limit switches and encoder options available
  • Stainless steel construction available (option SS)
  • Bakeable to 150°C (200°C for option SS)
Order Code Description
Price
VSM23-X-100 100 mm travel, 5 µm resolution2,644.003,510.003,210.00
VSM23-X-150 150 mm travel, 5 µm resolution2,965.003,935.003,600.00
VSM23-X-200 200 mm travel, 5 µm resolution3,470.004,605.004,210.00
VSM23-X-250 250 mm travel, 5 µm resolution3,670.004,870.004,455.00
VSM23-X-300 300 mm travel, 5 µm resolution3,887.005,160.004,715.00
VSM23-X-350 350 mm travel, 5 µm resolution4,087.005,425.004,960.00
VSM23-X-400 400 mm travel, 5 µm resolution4,337.005,755.005,260.00
VSM23-X-450 450 mm travel, 5 µm resolution4,584.006,085.005,560.00

Related Products

SMD4 Stepper Motor Drive

SMD4 Stepper Motor Drive 

Stepper motor drive optimised for use with AML UHV-compatible motors.

VSM Stage Mounting Brackets and Table

VSM Stage Mounting Brackets and Table 

Mounting Brackets For UHV Compatible Stages.

VSM17-X

VSM17-X 

High performance (rigid), modular UHV compatible stage. Travel ranges from 50 to 200 mm and can support looads up to 50 kg.

VSM17-Z

VSM17-Z 

High performance, modular UHV stage for Z-axis translation.

VSM17-R-72K

VSM17-R-72K 

High resolution UHV rotation stage. 0.005° resolution.

VSM17-R-3K6

VSM17-R-3K6 

Zero backlash UHV rotation stage. 0.1° resolution.

VSM17-G-070

VSM17-G-070 

High performance, modular UHV goniometer stage.

VSM17-G-114

VSM17-G-114 

High performance, modular UHV goniometer stage.

MLF18 18-way Electrical Feedthrough

MLF18 18-way Electrical Feedthrough 

MLF18F 18-way feedthrough on a DN40 CF flange (70 mm OD). Individual glass compression seals and bakeable to 250°C.