VSM23-X
VSM23-X linear translation stage for ultra high vacuum applications. Travel ranges from 100 to 450 mm and can support loads up to 20 kg.
Standard travels from 100 to 450 mm
5 µm resolution (1 µm for option HR)
Maximum speed 25 mm/s (5 mm/s for option HR)
Suitable for use to 1 x 10-10 mBar
VSM17-X
High performance (rigid), modular UHV compatible stage. Travel ranges from 50 to 200 mm and can support looads up to 50 kg.
Standard travels from 50 to 200 mm
5 µm resolution (1 µm for option HR)
Maximum speed 15 mm/s (3 mm/s for option HR)
Directly stackable for XYZ orientations
VSM17-Z
High performance, modular UHV stage for Z-axis translation.
Standard travels from 50 to 70 mm
1 µm resolution
30 kg centred load capacity
Maximum speed of 5 mm/sec
