Cutting edge MEMS sensor technology: AGP-1 Active Pirani Gauge

We’re excited to announce the launch of our new Active Pirani Gauge, the AGP-1. This new vacuum gauge offers best-in class performance by utilizing a MEMS (Microelectromechanical Systems) heat-loss Pirani sensor with a Piezo diaphragm sensor. The combination of these state-of-the-art sensors provide repeatable and accurate ultra-high vacuum measurements in the range of 1 x 10^-6 mBar to 1333 mBar.

The AGP Pirani gauge utilises precision digital signal processing and advanced measurement algorithms; when combined with our precision automated manufacturing and calibration processes, this product provides uncompromised measurement performance.

The Piezo diaphragm sensor eliminates the well-known gas dependency in the rough vacuum range of thermal conductivity gauges, and offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control of vacuum system venting processes and can prevent over-pressurization of the vacuum system.

Measurement range in mBar and accuracy of reading

The AGP-1 Active Pirani Gauge is appropriate for many applications, including:

• Mass spectrometers
• Scanning electron microscopes
• Furnace heat treatment
• PVD coating of glass, optics, tools, packaging, decorative
• Refrigeration manufacturing and service
• Semiconductor processing equipment
• Vacuum pump service

The transducer settings and parameters are user-programable from the serial interface enabling diagnostics, predictive maintenance, service, calibration, setpoint configuration, analog output scaling and acquisition of real-time vacuum pressure measurements. A wide selection of analog output scaling options to emulate other vendors’ vacuum gauges and transduces is available.

Utilising the ultra-wide range high-performance MEMS sensors incorporated into the AGP-1 Active Pirani Gauge, our new NGC3 Ion Gauge Controller is able to achieve a measurement range of 1200 mBar through to 3 x 10-11 mBar of continuous measurement. Although designed to work best with the AGP-1, the NGC3 supports many self-powered or active gauges/transducers with +10 V full-scale output from other vendors. Visit the NGC3 product page for more information.

The AGP-1 incorporates active temperature compensation and calibration; which provides an ultra-stable zero-point enabling a reliable, wide dynamic range. This also eliminates the need for frequent user re-zeroing due to zero-point drift, common in legacy Pirani and convection gauges.

Our active Pirani gauge has been designed for easy implementation into your control system with the use of an independent solid-state switch relay. This relay can be configured to switch based on a pressure or temperature programmable setpoint and hysteresis value and offers both normally closed and normally open contacts.

For more information about the AGP-1 or our other products, please do not hesitate to contact our dedicated team by emailing info@arunmicro.com.