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6-Axis UHV Mechanism
6-Axis UHV Mechanism
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6-Axis manipulation
Temperature: −65 °C → +175 °C
Custom Z-axis translation stage
Custom rotation stage full step resolution: 0.01°
Goniometer stage full step resolution 0.005°
Load: 5 kg
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6-Axis UHV Mechanism
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6-Axis Mechanism
M53