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4-Axis UHV Mechanism with VSM17 Stages
4-Axis UHV Mechanism with VSM17 Stages 1 white
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Vacuum: 1E-7 mBar
Temperature: 0 °C → +70 °C
Load: 6 kg centred on rotary table
Encoders on all axis
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4-Axis UHV Mechanism with VSM17 Stages
Keywords
4-Axis Mechanism
Encoder
Linear Stage
Rotation Stage
SG35-005
VSM17-R-72k
VSM17-X-150-SS
VSM17-X-200-SS