MEMS Active Pirani and Piezo Gauge
The AGP Pirani and piezo gauge incorporates cutting edge MEMS sensor technology with precision digital signal processing and advanced measurement algorithms.
Measurement range of 1 x 10-6 to 1200 mBar (7.5 x 10-7 to 900 Torr)
Ultra-wide range high performance MEMS sensors
Advanced innovative digital signal processing
Precision gas-independent sensor from 5 to 1200 mBar