Custom UHV Mechanism for C12 Quantum Fabricator.

AML is proud to share our recent collaboration with C12 Quantum Electronics (C12). C12 was launched in 2020 with the aim of developing new quantum technology. Their unique approach to the fabrication of qubits with carbon nanotubes makes it stand out in the quantum technology industry.

In October 2023, C12 inaugurated their first quantum chip production line in Paris. Multiple UHV stages from AML are part of C12’s “quantum fab”. These are used for precise in-vacuum sample positioning. In addition to standard stages, AML designed a custom mechanism in collaboration with C12. This custom mechanism was required for the final part of the fabrication process done in UHV, where the completed qubit microchip is hermetically sealed in a sample holder to ensure it is not exposed to ambient conditions. Sealing of the sample holder required a low speed and high axial force over a short travel range. This necessitated a unique custom design from AML.

Using AML’s D42.2 UHV stepper motor as a base, the mechanism incorporates worm gearing and rack and pinion gearing to drive a high axial load from the carriage. The mechanism produces 450 N axial force to hermetically seal the sample holder. Holding torque of the motor is utilised to maintain the seal whilst the vacuum chamber is vented. Full specification can be found in the table below.

Vacuum Environment: 1E-7 mbar
Max Load: 450 N
Travel: 32.5 mm
Speed: <1 mm/s
Full Step Resolution: 10.5 µm

This mechanism was constructed and assembled using UHV materials and methods. Assembly and testing of the mechanism was completed in our ISO class 7 clean room.

If you would like to discuss your in-vacuum motion requirements, please contact us at sales@arunmicro.com.