Custom 7-Axis UHV Mechanism
Posted on Monday 16th January 2023 at 16:00
Arun Microelectronics Ltd is proud to share our latest custom UHV mechanism. This complex 7-Axis system features multiple custom stages designed specifically to meet the unique requirements of its application. Watch our video demonstration of this mechanism above.
Vacuum: 1x10-8 mBar
7-Axes of movement
Multiple custom stages
Independent 600 mm length detector arm
This UHV mechanism is designed to offer precise motion control across seven degrees of freedom to maximise the variety of positioning options of the system. R3 is designed to support a sample of up to 20 kg. Once mounted, the sample can be manipulated and positioned across five degrees of freedom. The detector is mounted on the Z1 axis which can be vertically manipulated on the standard VSM17-100-HR-LS and rotated around the centre of the mechanism by the independent coaxial rotation stage. The independent coaxial rotation stage can travel 0-355° around the mechanism to maximise the detector's coverage of the sample. Using AML's SMD3 and Device Control Software, all seven axes can be manipulated simultaneously which enables each axis to rapidly orientate to precisely configured positions.
All stages are equipped with AML's UHV-compatible limit switches to improve the degree of control for each axis. Limit switches can be connected directly to AML's SMD3 stepper motor driver and utilise the SMD3 "Home" mode. This mode drives the axis to the positive or negative limit switch, allowing positions to be conveniently reset. This can then be used as a repeatable zero-position when writing scripts.
Aside from the Z1 axis, each axis is wired through the D-sub connection hub. This features UHV-compatible D-sub connectors to simplify the mechanism's connections, whilst maintaining UHV compatibility.
This mechanism was constructed and assembled using UHV materials and methods. These include the use of AML's UHV-compatible motors that feature vent holes and polyimide enamelled windings. All leadouts are polyimide wrapped, with limit switches and connectors manufactured in UHV-compatible PEEK. NyeTorr® ultra-low outgassing grease was used on the motor bearings, leadscrews, worms and gears. This helps ensure the operational longevity of the mechanism. Assembly and testing of the mechanism was completed in our ISO Class 7 cleanroom.
Listed below is the full specification of this mechanism:
|Lubrication||Nyetorr® 6300||Nyetorr® 6300||Nyetorr® 6300||Nyetorr® 6300||Nyetorr® 6300||Nyetorr® 6300||Nyetorr® 6300|
|Guide Type||Crossed roller||Crossed roller||Crossed roller||Crossed roller||Crossed roller||Crossed roller||Crossed roller|
|Travel||100 mm||0 - 360°||50 mm||350 mm||100 mm||0 - 355°||0 - 355°|
|Resolution (per step)||1 µm||0.001°||1 µm||1 µm||5 µm||0.001°||0.001°|
|Max Speed||5 mm/s||2 °/s||5 mm/s||5 mm/s||5 mm/s||2 °/s||2 °/s|
If you would like to discuss your in-vacuum motion system requirements, please do not hesitate to contact our dedicated team by emailing email@example.com.