UHV Mechanisms
Arun Micro > Products > UHV Mechanisms

UHV Mechanisms

These products include: Linear Translators, Rotary Stages and Stepper Motor Gearboxes.

Linear Translator

Linear Translator

LTV linear translators with 1µm or 5µm resolution per step and traverse speeds of 5 or 15 mm/sec. Directly stackable for XYZ with standard ranges of movement from 50mm to 250mm.
Stepper Motor Controller

Stepper Motor Controller

SMD210 Stepper motor controller specifically designed to match AML motors
Linear Translator (Rigid)

Linear Translator (Rigid)

LTX linear translators for larger loads and rigidity than available with the LTV version. 1µm or 5µm resolution per step and traverse speeds of 5 or 15 mm/sec. Directly stackable for XYZ with standard ranges of movement from 25mm to 85mm.
Rotary Stage

Rotary Stage

CRS rotational stages available with various ratios. Directly stackable with AML linear translators.
Electrical Feedthrough

Electrical Feedthrough

MLF18F 18-way feedthrough on a DN40 CF flange (70mm OD). Individual glass compression seals and bakeable to 250°C.
Vacuum-Side Connector

Vacuum-Side Connector

MLF18VCF/M bakeable male and female 18-way connectors. The female connector mates to either the male connector or to the vacuum-side of the MLF18F feedthrough.
SMD210 Connecting Cable

SMD210 Connecting Cable

Cable to connect the SMD210 stepper motor drive to a MLF18F feedthrough.